Japan's First Environmentally-Conscious Process Adopted In The New Plant 
For LTPS TFT LCD Panels.

Toshiba Matsushita Display Technology Co., Ltd. (TMD) has incorporated both state-of-the-art technology and a variety of environmentally-conscious concepts into its new production line for low-temperature poly-silicon (LTPS)*1 TFT liquid crystal display (LCD) panels (oftentimes referred to as SOG*2 technology), which just began operation at Ishikawa Works in Nomi-gun, Ishikawa Prefecture, in April earlier this year. As a result, TMD has succeeded in establishing a production line that can minimize greenhouse gas emissions (based on the amount of CO2 emissions) through the adoption of several processes including one that allows the on-site production and use of fluorine (F2) gas, which has a Global Warming Potential (GWP)*3 of zero (0), meaning that it is highly effective for the prevention of global warming. This is the first attempt in Japan to introduce an on-site F2 gas production system for use in LCD or semiconductor manufacturing plants.

In the production of liquid crystal displays and semiconductors, as the industry expands its scale, there is an increasing need for large-volume supply of cleaning gases for the CVD (chemical vapor deposition) process, which is used to deposit thin films on glass substrates and silicon wafers. Accordingly, the cleaning processes have become a focus in which to include environmentally-conscious concepts to prevent global warming. The F2 gas has been selected in TMD's innovative process because it is a promising substitute for nitrogen trifluoride (NF3). 

TMD has just succeeded in developing a cleaning process using the F2 gas, and has introduced a system to produce F2 gas on-site, rather than using NF3 (the conventional cleaning gas of choice), which is usually delivered and supplied in cylinders from gas suppliers. By adopting F2 gas, TMD will be contributing to the reduction of greenhouse gas emissions (based on the amount of CO2 emissions) to zero from the cleaning process, whereas with NF3 gas, zero gas emissions could not be achieved, even with detoxifying systems. Also, by using F2 gas, the unit price of gas consumption has been reduced and substantial cost reductions have been attained.

TMD has been promoting our internal improvement of manufacturing processes based on our Environmental Management Policy to develop the most advanced LCD panels, with careful consideration given to environmental protection, starting with our production process all the way through to our finished products. The newly introduced line in Ishikawa Works establishes a production facility that incorporates the greatest possible solutions to prevent global warming, as mentioned above, and minimizes possible environmental impacts through the reduction of waste emissions and through further improvements in the control of wastewater treatment.

Toshiba Matsushita Display Technology Co., Ltd. will continue to render greater service to society through our advanced environmental management policy under the environmental slogan of "Present Dream-Inspiring Displays to the Future", reflecting the essence of our corporate philosophy and management vision. 

*1 Low-temperature poly-silicon (LTPS) is a technology ideally suited for mobile
    applications. TMD has been a leader in the field of LTPS technology.
*2 SOG (System On Glass): A high value-added technology which allows the
    integration of peripheral IC circuitry and many other additional functions into the
    LCD panel, which plays an important role in differentiating low-temperature poly-
    silicon (LTPS) technology from common amorphous-silicon technology used in
    LCD panels.
*3 GWP is the ratio of the warming caused by a substance to the warming caused by
    a similar mass of carbon dioxide whose GWP (Global Warming Potential) is one
    (GWP100: GWP over a period of time of 100 years). GWP of F2=0 and GWP of
    NF3=10,800.

 

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